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The WCT-120PL is an affordable, tabletop silicon lifetime and wafer metrology system. description of WCT-120
 
WCT-120PL: Wafer LIfetime Measurement with Photoluminescence Detector

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photo of WCT-120 instrument

Measure the calibrated carrier-recombination lifetime of a silicon wafer using both the standard method and the photoluminescence method.
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Product Overview
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The WCT-120PL wafer lifetime measurement tool showcases the same unique measurement and analysis techniques as the WCT-120 with the added capability of a photoluminescence (PL) detector to measure the PL lifetime and doping of the sample under test. Both the Quasi-Steady-State -Photoconductance (QSSPC) lifetime measurement method and the Transient Photo-conductance Decay (PCD) lifetime measurement method are complemented with a calibrated PL lifetime measurement. The tool can also easily be used as a standard WCT-120.
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WCT-120PL System Capabilities
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Primary application:
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Step-by-step monitoring and optimization of a fabrication process using the QSSPC or Transient lifetime measurement alongside a PL measurement.
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Other applications:
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chart for WCT-120 instrument
Sinton Instruments’ WCT-120PL showcases a calibrated PL lifetime curve alongside a calibrated QSSPC lifetime curve yielding lifetime data over a wide range of carrier densities.

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Monitoring initial material quality
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Detecting heavy metals contamination during wafer processing
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Evaluating surface passivation and emitter dopant diffusion
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Evaluating process-induced shunting using the implied-Voc measurement
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Iteratively calculate all substrate doping from QSSPL and QSSPC data
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Further Information
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For key features, specifications, and additional information, download the WCT-120PL product note (PDF).

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