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  description of WCT-120
 
Sinton Instruments IL-800 Inline Wafer-Lifetime Testing

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photo of WCT-IL800 instrument in an inline application (courtesy S. Rein)

Fast inline testing with no compromises. Monitor wafer lifetime, sheet resistance and trapping with the comprehensive accuracy of an offline tool and an optimized industrial software package.
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Product Overview
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The calibrated measurements that have been developed for the Sinton WCT-120 offline lifetime tester can be applied inline, to accomplish sophisticated process monitoring in an industrial production line.
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The IL-800 offers a single large-area measurement of wafer lifetime which balances the effects of grain boundaries or growth variations. The measurement unit with its integrated excitation source may be mounted under or over a wafer track, to characterize each passing wafer with our calibrated non-contact sensor.
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IL-800 System Capabilities
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Primary application:
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Step-by-step monitoring and optimization of the production line, using measurements on product wafers at key stages in the process.
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Example applications:
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  Integration Overview
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We welcome inquiries from automation vendors who require a reliable and cost-effective inline lifetime measurement, with professional support and training. We also work directly with R&D and other small fabs and their choice of automation supplier to integrate the IL-800 into any metrology workstation.
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The standard operating software has allowances for rapid prototyping and testing upon delivery. In the automated mode, the software client
offers vital wafer results to a server database,
using options such as a local OPC server or
Profibus interface. Sinton Instruments’ characteristic reports of minority-carrier dependent lifetime are also standard.

Monitoring incoming wafer quality (lifetime, sheet resistance, and trapping)
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Monitoring phosphorus diffusion quality
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Early detection of wafer contamination from water, chemicals, furnaces, or wafer handling during the process
Maintaining optimal surface passivation quality from the nitride deposition
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Further Information
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For key features, specifications, and additional information, download the IL-800 product note (PDF - 603k).

Request a quote
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